Farewell to the Swiss Army Knife?

See Tevet profile in SEMI’s Quarterly Report to Members
©Copyright SEMI. This article originally appeared in the Fall 2006 issue of the SEMI Quarterly
Report to Members. For the original article, please click here.

Optical film-thickness metrology enters the mix-and-match era
sst.pennnet.com

Metrology: Quick and dirty Tevet style

Film thickness mesurement inside & between deep trenches for STI CMP

Performing STI process control using large-spot-size Fourier-transform reflectometry
micromagazine.com